| Feb 1978 | Company establishment |
|---|---|
| May 1979 | Started manufacturing and sales of semiconductor manufacturing equipment |
| Jun 1983 | Head office relocation |
| Oct 1984 | Sendai factory establishment (Mono crystal silicon ingot/wafer) ※Integrated to group company in 2011 |
| May 1990 | Kawaguchi factory establishment(semiconductor manufacturing equipment) ※Withdraw from business in 2011 |
| Apr 2004 | Kochi factory establishment(Mono crystal silicon ingot) |
| Apr 2007 | 1st Soma factory establishment(Polysilicon) |
| Jan 2009 | Kochi 2md factory establishment(Mono crystal silicon ingot) |
| Jun 2009 | Capital alliance with AU Optronics Corp. |
| Aug 2010 | Soma 2nd factory establishment(Polysilicon) ※Withdraw from business in 2017 |
| May 2014 | Head office relocation(Shiba, Minato-ku, Tokyo) |

